Trichlorosilane 三氯氢硅 (SiHCl3)
Total Purity 纯度：>99.95%
Vapor Phase Impurities
气相杂质
|
Contaminants 杂质 |
|
Specifications 规格 |
|
Fe |
铁 |
<5 ppb |
|
Cr |
铬 |
<2 ppb |
|
Mn |
锰 |
<0.2 ppb |
|
Ni |
镍 |
<1 ppb |
|
Al |
铝 |
<1 ppb |
|
Mo |
钼 |
<1 ppb |
|
Cu |
铜 |
<0.05 ppb |
|
Co |
钴 |
<0.02 ppb |
|
B |
硼 |
<0.06 ppb |
|
P |
磷 |
<0.01 ppb |
|
O |
氧 |
<1 ppm |
|
Resistivity |
Resistivity 电阻系数 |
>800 ohm-cm |
Standard Package Information
包装规格
|
Cylinder Type气瓶规格 |
CMC |
|
Fill Weight充装量 (kg) |
CMC |
|
Valve Connection 阀门(CGA) |
CMC |